3D Atom Probe – LEAP 5000

3D Atom Probe Microscope with unmatched 3D sub-nanometer analytical performance

The LEAP 5000 is CAMECA’s cutting-edge atom probe microscope, offering superior detection efficiency across a wide variety of metals, semiconductors and insulators: more than 40% extra atoms detected per nm3 analyzed.

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The LEAP 5000 collects nanoscale information from a microscale dataset in just a few hours and delivers improved compositional accuracy, precision and detection limits, enhanced sample throughput together with increased yield and ultimate reproducibility.

  • Optimized detection efficiency provides unparalleled sensitivity
  • Large Field-of-View and detection uniformity - the ultimate 3D spatial resolution
  • Excellent multi-hit detection capabilities for the most accurate compositional measurements
  • Fast and variable repetition rate for ultra-high speed data acquisition
  • Robust & ergonomic platform for increased ease-of-use and reduced time-to-knowledge
  • Live-time monitoring to ensure the highest quality data in every measurement
  • Advanced laser control algorithms provide measurably improved sample yields

The LEAP 5000 Family

LEAP 5000 XS
The LEAP 5000 XS combines new flight path technology with enhanced detector performance to offer improved field of view whilst achieving unprecedented detection efficiency ~ 80%, the highest of any such analytical technique! In addition, the advanced laser pulse module capable of offering repetition rates of up to 2 MHz makes the LEAP 5000 XS the ultimate in efficiency and productivity.

LEAP 5000 XR
The LEAP 5000 XR incorporates the advanced reflectron design and enhanced detector performance (detection efficiency increased to ~ 50%) and adds all the benefits of advanced laser pulsing capable of repetition rates of up to 500kHz. The LEAP 5000 XR is the most capable atom probe across the widest variety of research and development applications.

LEAP 5000 R
An improved voltage pulsing system capable of 40% greater pulse amplitudes and pulse repetition rates up to 500 kHz together with a new advanced reflectron design and enhanced detector performance makes the LEAP 5000 R the most powerful voltage mode atom probe ever produced.


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From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a manufacturer of movie theater projectors, and soon the CAMECA products evolved into scientific instrumentation. Since pioneering Electron Probe MicroAnalysis (EPMA) in the 1950's and Secondary Ion Mass Spectrometry (SIMS) in the 1960's, CAMECA has remained the undisputed world leader in these techniques while achieving numerous breakthrough innovations in complementary techniques such as Low energy Electron induced X-ray Emission Spectrometry (LEXES), and 3D Atom Probe. CAMECA has evolved from a manufacturer of scientific instrumentation for the international research community to a provider of in-fab and near-fab metrology solutions for the semiconductor manufacturing industry. Today, CAMECA employs over 300 employees around the world, with locations in the USA, Germany, Japan, Korea, China, and Taiwan, and a wide network of agents, ensuring the best level of support to all users. Our mission is to focus on instrumental development to offer our customers the highest analytical performance in their specialized characterization fields. CAMECA is headquartered in Gennevilliers near Paris, France. Our plant is a state-of-the-art facility with clean room environment, electron and ion optics simulation, advanced CAD, UHV cleaning... Operating under ISO 9001 certification, CAMECA controls not only the technology, but all aspects in the designing, manufacturing, installing and servicing of its products. In 2007, CAMECA joined AMETEK, Inc., a leading global provider of electronic instruments and electromechanical devices, as part of the AMETEK Materials Analysis Division.


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