SXFive

Electron Probe Micro Analyzer for Materials & Geosciences

Combining advanced electron optics, state-of-the-art spectrometer design and dedicated software, the CAMECA SXFive performs high accuracy qualitative and quantitative chemical microanalysis in geochemistry, mineralogy, geochronology, physical and nuclear metallurgy, material sciences (including cements, glass, ceramics …), biochemistry, microelectronics…

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Optimized electron column

The SXFive comes equipped with a versatile electron gun compatible with W and LaB6. The beam current is continuously regulated, achieving a stability of 0.3% per 12 hours, thus enabling reliable long term quantitative analyses. The beam intensity is accurately measured thanks to an annular Faraday cup and electrostatic deflection. The high voltage system operates at up to 30 kV for elements with high atomic number. High intensity beam currents (several µA) may be used for trace element measurements and high speed X-ray mapping.
The SXFive can be upgraded with a Field Emission source (see SXFiveFE model).

The finest Wavelength Dispersive Spectrometers (WDS)

Quantitative x-ray mapping in carburized steelWavelength Dispersive Spectrometry is acknowledged as the method of choice for high precision quantitative analysis. Up to 5 WDS spectrometers, plus one energy dispersive spectrometer EDS, may be fitted to the SXFivemicroprobe. Optical encoders ensure the accurate positioning of the spectrometers which can be mounted vertically for flat and polished specimens or may be inclined for rough specimens. High sensitivity crystalsallow a nearly 3-fold increase in count rate while maintaining peak to background ratio and spectral resolution, and keeping the full spectrometer analysis range.
Right side example shows optimized Ca, Fe and Mg mapping with the CAMECA high intensity crystals.

Fully integrated optical microscope

Using a CCD digital camera, opaque specimens are viewed in reflected light while thin sections are imaged in transmitted light. The Field Of View of the optical image is continuously variable from 250 to 1700 µm thanks to a motorized lens. An autofocus system guarantees that the specimen surface returns to the correctly focused position at any time.

Dedicated automation and analysis software package

The SXFive is equipped with modern X-ray imaging acquisition technologies, PC automation under the latest Windows version, and a user-friendly interface. All analytical processes are fully automated for maximum efficiency. You may request our PeakSight brochure for full details on this dedicated software package.

http://www.cameca.com/products/epma/sxfive

Enquiry Email: webenquiry@wirsam.com

Brand

Cameca

From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a manufacturer of movie theater projectors, and soon the CAMECA products evolved into scientific instrumentation. Since pioneering Electron Probe MicroAnalysis (EPMA) in the 1950's and Secondary Ion Mass Spectrometry (SIMS) in the 1960's, CAMECA has remained the undisputed world leader in these techniques while achieving numerous breakthrough innovations in complementary techniques such as Low energy Electron induced X-ray Emission Spectrometry (LEXES), and 3D Atom Probe. CAMECA has evolved from a manufacturer of scientific instrumentation for the international research community to a provider of in-fab and near-fab metrology solutions for the semiconductor manufacturing industry. Today, CAMECA employs over 300 employees around the world, with locations in the USA, Germany, Japan, Korea, China, and Taiwan, and a wide network of agents, ensuring the best level of support to all users. Our mission is to focus on instrumental development to offer our customers the highest analytical performance in their specialized characterization fields. CAMECA is headquartered in Gennevilliers near Paris, France. Our plant is a state-of-the-art facility with clean room environment, electron and ion optics simulation, advanced CAD, UHV cleaning... Operating under ISO 9001 certification, CAMECA controls not only the technology, but all aspects in the designing, manufacturing, installing and servicing of its products. In 2007, CAMECA joined AMETEK, Inc., a leading global provider of electronic instruments and electromechanical devices, as part of the AMETEK Materials Analysis Division.

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