Field Emission Electron Probe Micro Analyzer for Quantitative Analysis and X-Ray Mapping at the Highest Possible Spatial Resolution

The SXFiveFE is CAMECA’s fifth generation electron probe microanalyzer. It brings together all of the best features of CAMECA’s previous EPMA models and incorporates a number of outstanding features, including the unique combination of a field emission electron column with CAMECA’s industry-leading high-sensitivity and resolution spectrometers.
The SXFiveFE performs high accuracy quantitative chemical microanalysis at highest possible spatial resolution in mineralogy, geochronology, and material sciences.

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Optimized Field Emission electron column

The SXFiveFE is equipped with a Field Emission (FE) electron source (Schottky emitter). The electron column has been optimized to achieve small beam diameters with high beam currents even at low accelerating voltages thus enabling X-ray mapping and quantitative analysis at extremely high spatial resolution. The beam intensity is accurately measured with an annular Faraday cup and is continuously regulated, achieving a stability of 0.5% per hour, thus enabling reliable quantitative analyses. The high voltage system operates at up to 30 kV for elements with high atomic number.

High spatial resolution x-ray mappingOn the left:
Cr and Al X-ray maps on a Nickel-based superalloy demonstrating the high resolution capabilities of theSXFiveFE.

Sample courtesy of Dr.-Ing. I. Lopez-Galilea, Ruhr-Universität Bochum, Germany.

The finest Wavelength Dispersive Spectrometers (WDS)

Wavelength Dispersive Spectrometry is acknowledged as the method of choice for high precision quantitative analysis. Up to 5 WDS spectrometers, plus one energy dispersive spectrometer EDS, may be fitted to the SXFiveFE microprobe. Optical encoders ensure the accurate positioning of the spectrometers which can be mounted vertically for flat and polished specimens or may be inclined for rough specimens. High sensitivity crystals allow a nearly 3-fold increase in count rate while maintaining peak to background ratio and spectral resolution, and keeping the full spectrometer analysis range, making the SXFive and SXFiveFE instruments of choice for the analysis of  trace and light elements.

Optimized vacuum

The SXFiveFE is evacuated with a turbomolecular pump backed with a dry rough pump to ensure a clean vacuum environment. The column is pumped with 2 ion getter pumps to achiev UHV conditions in the Field Emission source volume. All valves are pneumatically activated and all vacuum sequences are controlled with a new processor for increased reliability.

Fully integrated optical microscope for easy sample navigation

Using a digital CCD camera, opaque specimens are viewed in reflected light while thin sections are imaged in transmitted light. The Field Of View of the optical image is continuously variable from 250 to 1700 µm thanks to a motorized lens, and an autofocus system guarantees that the specimen surface returns to the correctly focused position at any time.

Dedicated automation and analysis software package

The SXFiveFE is equipped with the latest imaging X-ray acquisition, PC automation under the latest Windows version and user interface technology. Automation has been enhanced for maximum efficiency and unattended analysis. You may request our PeakSight brochure for full details on this dedicated software package.

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From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a manufacturer of movie theater projectors, and soon the CAMECA products evolved into scientific instrumentation. Since pioneering Electron Probe MicroAnalysis (EPMA) in the 1950's and Secondary Ion Mass Spectrometry (SIMS) in the 1960's, CAMECA has remained the undisputed world leader in these techniques while achieving numerous breakthrough innovations in complementary techniques such as Low energy Electron induced X-ray Emission Spectrometry (LEXES), and 3D Atom Probe. CAMECA has evolved from a manufacturer of scientific instrumentation for the international research community to a provider of in-fab and near-fab metrology solutions for the semiconductor manufacturing industry. Today, CAMECA employs over 300 employees around the world, with locations in the USA, Germany, Japan, Korea, China, and Taiwan, and a wide network of agents, ensuring the best level of support to all users. Our mission is to focus on instrumental development to offer our customers the highest analytical performance in their specialized characterization fields. CAMECA is headquartered in Gennevilliers near Paris, France. Our plant is a state-of-the-art facility with clean room environment, electron and ion optics simulation, advanced CAD, UHV cleaning... Operating under ISO 9001 certification, CAMECA controls not only the technology, but all aspects in the designing, manufacturing, installing and servicing of its products. In 2007, CAMECA joined AMETEK, Inc., a leading global provider of electronic instruments and electromechanical devices, as part of the AMETEK Materials Analysis Division.


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