LEXT OLS5500 3D Optical Profilometer
Evident (Olympus) Laser Confocal Microscope & 3D Profilometer
- Non-contact 3D surface roughness measurement
- Laser scanning confocal technology
- Sub-nanometre height resolution
- Automated stitching for large-area profiling
- Compliant with ISO 25178 surface texture standards
Product Overview
The Evident LEXT OLS5500 laser confocal microscope provides high-resolution 3D surface topography measurement with 0.12 nm height resolution. Non-contact ISO 25178 surface texture analysis for roughness, waviness and form measurement in materials, semiconductor and precision manufacturing applications.
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Technical Specifications
| Type | 3D Laser Scanning Confocal Profilometer |
| Technique | Laser scanning confocal microscopy |
| Height Resolution | Sub-nanometre (0.012 µm pitch) |
| Lateral Resolution | 0.12 µm |
| Objectives | 5× – 100× LEXT-dedicated |
| Measurement Area | Up to 20 mm (stitching) |
| Compliance | ISO 25178, ISO 4287/4288 |
| Software | LEXT OLS5500 analysis software |
| Applications | Surface roughness, 3D shape, film thickness |
| Power | 100–240 V / 50–60 Hz |
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