IMS 7f-Auto
Magnetic Sector SIMS
- High-sensitivity magnetic sector SIMS for trace element analysis
- Sub-ppm detection limits for most elements
- Lateral resolution down to 1 µm
- Automated multi-sample analysis with programmable sequences
- Depth profiling with excellent depth resolution
Product Overview
The CAMECA IMS 7f-Auto is an automated magnetic sector secondary ion mass spectrometer (SIMS) designed for high-sensitivity trace element and isotope ratio analysis at the micrometre scale. The IMS 7f-Auto offers automated sample handling and measurement routines, enabling unattended multi-sample analysis for high-throughput applications.
The instrument is widely used in the semiconductor industry for dopant profiling and contamination analysis, in geosciences for U-Pb geochronology and trace element mapping, and in nuclear safeguards for particle analysis. Its combination of high mass resolution, excellent transmission and flexible primary ion beam options (O₂⁺ and Cs⁺) makes it a versatile platform for both surface and bulk analysis at detection limits reaching parts per billion.
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Technical Specifications
| Technique | Magnetic Sector SIMS |
| Ion Sources | O₂⁺, Cs⁺ primary beams |
| Mass Resolution | M/ΔM > 10,000 |
| Lateral Resolution | ~1 µm |
| Detection Limits | Sub-ppm for most elements |
| Sample Size | Up to 100 mm wafer or 25 mm round |
| Depth Profiling | Yes, with sputter depth control |
| Detectors | Electron multiplier, Faraday cup |
| Automation | Fully automated multi-sample analysis |
| Software | CAMECA IMS software |
Downloads & Resources
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Industries & Applications
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