MX63 Wafer Inspection Microscope
Evident (Olympus) MX63 Semiconductor Inspection Microscope
- Fully motorised inspection microscope for semiconductor wafers
- Large stage for wafers up to 300 mm
- Automated macro-to-micro observation
- Brightfield, darkfield, DIC and polarisation
- High-throughput pattern and defect inspection
Product Overview
The Evident MX63 is designed for semiconductor wafer and flat panel display inspection, with brightfield, darkfield and DIC contrast modes for detecting surface defects, particles and pattern anomalies on substrates up to 12 inches.
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Technical Specifications
| Type | Motorised Wafer Inspection Microscope |
| Stage | Motorised XY for wafers up to 300 mm |
| Objectives | MPLFLN / LMPLFLN (5× – 100×) |
| Contrast | BF, DF, DIC, POL |
| Illumination | LED reflected light |
| Automation | Macro-to-micro automated observation |
| Software | PRECiV / custom inspection |
| Applications | Semiconductor wafer, FPD inspection |
| Camera | High-resolution digital |
| Power | 100–240 V / 50–60 Hz |
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