Rigaku

TXRF Spectrometers

TXRF Spectrometer

TXRF Spectrometer — Rigaku
  • Total reflection XRF for ultra-trace elemental analysis
  • Detection limits in the parts-per-billion range
  • Minimal sample preparation — microlitre volumes
  • Non-destructive analysis of wafer surfaces
  • Suitable for semiconductor, environmental and life science applications


Product Overview

Rigaku total reflection X-ray fluorescence (TXRF) spectrometers provide ultra-trace elemental analysis with detection limits in the parts-per-billion (ppb) range. TXRF uses a grazing-incidence geometry to dramatically reduce background signals, enabling the detection of trace and ultra-trace elements in microlitre sample volumes deposited on a polished carrier.

TXRF spectrometers are used in semiconductor contamination monitoring, pharmaceutical quality control, environmental water analysis, forensics and materials research where extremely low detection limits are required from very small sample quantities. The technique requires minimal sample preparation, consumes negligible amounts of material and is inherently non-destructive to the carrier surface.

Manufacturer

Rigaku

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Category

Analytical X-Ray

XRF Spectrometers (EDXRF, WDXRF)

Supplier Page

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Technical Specifications

Technique Total Reflection XRF (TXRF)
Detector Silicon Drift Detector (SDD)
Element Range Na – U
Detection Limits ppb range
Sample Volume 1–50 µL
Sample Carrier Quartz disc
Excitation Mo or W X-ray tube
Analysis Time 100–1000 seconds
Applications Semiconductor, environmental, life science
Power Single-phase 100–240 V / 50–60 Hz

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