
TXRF Spectrometers
TXRF Spectrometer
- Total reflection XRF for ultra-trace elemental analysis
- Detection limits in the parts-per-billion range
- Minimal sample preparation — microlitre volumes
- Non-destructive analysis of wafer surfaces
- Suitable for semiconductor, environmental and life science applications
Product Overview
Rigaku total reflection X-ray fluorescence (TXRF) spectrometers provide ultra-trace elemental analysis with detection limits in the parts-per-billion (ppb) range. TXRF uses a grazing-incidence geometry to dramatically reduce background signals, enabling the detection of trace and ultra-trace elements in microlitre sample volumes deposited on a polished carrier.
TXRF spectrometers are used in semiconductor contamination monitoring, pharmaceutical quality control, environmental water analysis, forensics and materials research where extremely low detection limits are required from very small sample quantities. The technique requires minimal sample preparation, consumes negligible amounts of material and is inherently non-destructive to the carrier surface.
Supplier Page
Technical Specifications
| Technique | Total Reflection XRF (TXRF) |
| Detector | Silicon Drift Detector (SDD) |
| Element Range | Na – U |
| Detection Limits | ppb range |
| Sample Volume | 1–50 µL |
| Sample Carrier | Quartz disc |
| Excitation | Mo or W X-ray tube |
| Analysis Time | 100–1000 seconds |
| Applications | Semiconductor, environmental, life science |
| Power | Single-phase 100–240 V / 50–60 Hz |
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Industries & Applications
Commonly used in the following sectors
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